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TWEEZERS

 

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Purest Silicon Carbide (SiC) tipped tweezers,
protect wafer completely from metallic pollution
Cleanroom package (Class 100 - 1,000)

       
 
     
● Max. 6-inch diameter wafer holdable
  ● Body - Titanium alloy
・Light weight
・Anti-magnetic
・Non-corrosive
● Tip - SiC (Hydrosilicon)
・Extra high purity at PPb level
・Anti-static
・Anti-chemical
・Heat resistant
   
 
  ●Tip Dimensions
  A:11o B:9o C:2o D:3.6o E:2.4o
 
 
● Length : 150 mm
                 
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■Characteristics
Item Features
Density (kg/M3) 3.21×10*3
Bending moment  (kgf/mm2) 80
Tensil stress (kgf/mm2) 60
Young's modules (kgf/mm2) 50,000
Hardness (kgf/mm2) HK:3,500
Coefficient of linear exp ansion
(I/℃)
4.5×10*−6
Heat conductivity (cal/cm・s・℃) 0.16
Specific resistance  (Ω・m) 100
(※) Figures at room temperature

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■No-Corrosion
Conditions Temp. Time Weight change
6N HCI Boiling Point
(110)
1470 h none
9N HNO3 Boiling Point
(116)
1470 h
19N H2SO4 Boiling Point
(128)
1470 h
Nitric acid 17%HF.
83%HNO3
Room Temp 532 h
     
Aqua regia 80℃ 186 h

Atmosphere 1500℃ 146 h none
HCIG gas 1200℃ 25 h

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■Impurity contained
Element Density (unit: ppb)
Cu <100
K <60
Mo <40
Fe 35
Cr 26
Zn 9
Mn 9
W < 4
Na < 2
Co 1.3
La 0.8
Ag 0.8
Hf 0.32
Au <0.09
Sc <0.01

 
 
 
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